Also for 1 micron resolution, thick SU 8 resist will induce lot of stress in the film. Hence use a very thin SU 8 film may be upto 2 microns thick. ________________________________ From: gau sTo: "howdilydoo@gmail.com" ; General MEMS discussion Sent: Friday, August 5, 2011 10:24 AM Subject: Re: [mems-talk] Recommend a negative resist You can try using SU 8 2000.5 or 2002 and adjust you spin coat parameters in order to get 1 micron thickness.