If you also do a lift-off process (which is particularly easy if you use a
LOR/S18xx bilayer) then you can just let the bottom electrode extend out
from underneath the ALD layer in one direction.  If you don't you can just
etch through the ALD layer on one side of the top electrode...

-Alex

On Thu, Sep 15, 2011 at 11:35 AM, Roy Yang  wrote:

> Dear community,
>
> I have read information about the liftoff of ALD insulator (
> http://marcuslab.harvard.edu/papers/Biercuk_ALD_APL.pdf). In the paper
> they
> have also reported the electrical measurement of a triple layer capacitor
> consisting of Pt-insulator-Pt. My question is, what can be the easiest way
> to electrically access the bottom contact layer right under the ALD wrap?
> Thanks a lot and welcome any comments if you happen to know more details
> about the measurement done in that paper.
>
> Best,
>
> Josh