Hi, Thanks for reply. I try not to go with wet etching to avoid undercut issue since the photoresist mask patterns are closely packed and "um" target thickness to be etched into alumina. Caleb ________________________________ From: Kirt WilliamsTo: 'General MEMS discussion' Sent: Thursday, March 8, 2012 2:37 PM Subject: RE: [mems-talk] Dry Etch Al2O3 with photoresist mask Try wet etching it in 5:1 BHF or a similar HF solution. --Kirt Williams -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Sherman GUO Sent: Thursday, March 08, 2012 8:42 AM To: mems-talk@memsnet.org Subject: [mems-talk] Dry Etch Al2O3 with photoresist mask Hi, group, I have been trying to do dry etching on Alumina (grown by e-beam evaporation) with mask of photoresist (OiR908) . Gas agents are BCl3(6) and Ar(14). The problem is the selectivity is 3:1 PR:Al2O3, which requires extremely thick resist for targeting ~um thick Alumina etching. Is there any other dry etching recipe for selective etching alumina over photoresist? Any help will be highly appreciated. Best Regards, Caleb Guo _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk