Hi to all, I'm trying to replicate on PMMA sheet (1525 microns and 500microns) a silicon master with circles whose dimensions are in the range between 100nm to 400nm diameter (and 250nm height in all of them) with NIL. My process is: - Clean the silicon master during 15 minutes in Piranha (Can I do the same with Plasma Cleaner? Is the same?I have a very simple Plasma with maximum 20W. ) - Put the master in a desiccator with 100microliters of Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple vaccum . - NIL process: put the master and above I put the PMMA sheet with one Teflon sheet and 3 aluminium sheets. During 10 minutes with 50bar and 180ÂșC. My problem is: The 100nm are not replicated and the PMMA sticks to the master, and then the master gets dirty. Can someone helps me to improve the process? _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk