Hi,



The anti-stiction layer (ASL) is typically a monolayer of fluorosilane,
either by spincoating or vapor deposition onto master stamp's surface.



Best Regards,

Tian Tang



EV Group
invent * innovate * implement
Applications Engineer - Direct: +1 (480) 305 2455, Main: +1 (480) 305
2400 Fax: +1 (480) 305 2401
Cell: +1 (480) 274 3892
E-Mail: T.Tang@EVGroup.com 
Web: www.EVGroup.com 


This message and any attachments contain confidential or privileged
information, which is intended for the named addressee(s) only. If you
have received it in error, please notify the sender immediately and then
delete this e-mail. Please note that unauthorized review, copying,
disclosing, distributing or otherwise making use of the information is
strictly prohibited.

Save paper and trees! Please consider the environment before printing
this e-mail.

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk