ASL==Anti Stiction Layer.

Maybe try FDTS, its almost what you were using before but dodecyl instead
of octyl
On Mar 21, 2013 2:21 PM, "Judith Linacero Blanco" 
wrote:

> Hi Tian,
>
> Thanks for the information, but send my samples to this company is very
> expensive for us. But you say another option that you call ASL quemical,
> what is this? where can I get it?
>
> Thanks a lot.
>
>
>
> 2013/3/13 Tang Tian 
>
> > Hi,
> >
> > You need to apply anti-stiction layer on the master stamp prior to doing
> > imprints.
> >
> > There is a company called Applied Micro Structures Inc (
> www.appliedmst.com)
> > specializes in this and can do this for you.  Otherwise you will need to
> > spincoat ASL chemical yourself.
> >
> >
> > Best Regards,
> >
> >
> > Tian Tang
> >
> > EV Group
> > invent • innovate • implement
> > Applications Engineer - Direct: +1 (480) 305 2455, Main: +1 (480) 305
> 2400Fax: +1
> > (480) 305 2401
> > Cell: +1 (480) 274 3892
> > E-Mail: T.Tang@EVGroup.com
> > Web: www.EVGroup.com
> >
> >
> > On Mar 13, 2013, at 8:43, Judith Linacero Blanco 
> > wrote:
> >
> > > Hi to all,
> > >
> > > I'm trying to replicate on PMMA sheet (1525 microns and 500microns) a
> > > silicon master with circles whose dimensions are in the range between
> > 100nm
> > > to 400nm diameter (and 250nm height in all of them) with NIL.
> > >
> > > My process is:
> > >
> > > -  Clean the silicon master during 15 minutes in Piranha (Can I do the
> > same
> > > with Plasma Cleaner? Is the same?I have a very simple Plasma with
> maximum
> > > 20W. )
> > >
> > > - Put the master in a desiccator with 100microliters of
> > > Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple
> > > vaccum .
> > >
> > > - NIL process: put the master and above I put the PMMA sheet with one
> > > Teflon sheet and 3 aluminium sheets.
> > > During 10 minutes with 50bar and 180ºC.
> > >
> > > My problem is: The 100nm are not replicated and the PMMA sticks to the
> > > master, and then the master gets dirty.
> > >
> > > Can someone helps me to improve the process?
> > >
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