Hi,

You need to apply anti-stiction layer on the master stamp prior to doing
imprints.

There is a company called Applied Micro Structures Inc (www.appliedmst.com)
specializes in this and can do this for you.  Otherwise you will need to
spincoat ASL chemical yourself.


Best Regards,


Tian Tang

EV Group
invent • innovate • implement
Applications Engineer - Direct: +1 (480) 305 2455, Main: +1 (480) 305 2400 Fax:
+1 (480) 305 2401
Cell: +1 (480) 274 3892
E-Mail: T.Tang@EVGroup.com
Web: www.EVGroup.com


On Mar 13, 2013, at 8:43, Judith Linacero Blanco  wrote:

> Hi to all,
>
> I'm trying to replicate on PMMA sheet (1525 microns and 500microns) a
> silicon master with circles whose dimensions are in the range between 100nm
> to 400nm diameter (and 250nm height in all of them) with NIL.
>
> My process is:
>
> -  Clean the silicon master during 15 minutes in Piranha (Can I do the same
> with Plasma Cleaner? Is the same?I have a very simple Plasma with maximum
> 20W. )
>
> - Put the master in a desiccator with 100microliters of
> Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple
> vaccum .
>
> - NIL process: put the master and above I put the PMMA sheet with one
> Teflon sheet and 3 aluminium sheets.
> During 10 minutes with 50bar and 180ºC.
>
> My problem is: The 100nm are not replicated and the PMMA sticks to the
> master, and then the master gets dirty.
>
> Can someone helps me to improve the process?
>
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