SU8 is an epoxy and you need an epoxy stripper to take it off. If I remember right, Microchem sells a material that you spin under the SU8 that enables you to remove it later -----Original Message----- From: mems-talk-bounces+shay=mizur.com@memsnet.org [mailto:mems-talk- bounces+shay=mizur.com@memsnet.org] On Behalf Of ??? Sent: Thursday, April 03, 2014 8:28 AM To: General MEMS discussion Subject: [mems-talk] su-8 2002 removal method I used SU-8 2002 for sacrificial layer(about 2um). after whole process is finished, I want to remove SU-8 layer. but, it is very hard. I used Remover PG(80β, 30min) but it is indissolubleness(?). For forming mems sensor, the metal layers are deposited around a SU-8 layer. So I want to remove SU-8 2002 without damages of other structures. How can I do it? _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk