i think the stripper is called Omni coat, a product from Microchem. On Thu, Apr 3, 2014 at 7:54 PM, shay kaplanwrote: > SU8 is an epoxy and you need an epoxy stripper to take it off. > If I remember right, Microchem sells a material that you spin under the > SU8 that enables you to remove it later > > -----Original Message----- > From: mems-talk-bounces+shay=mizur.com@memsnet.org [mailto: > mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of ??? > Sent: Thursday, April 03, 2014 8:28 AM > To: General MEMS discussion > Subject: [mems-talk] su-8 2002 removal method > > I used SU-8 2002 for sacrificial layer(about 2um). > > after whole process is finished, I want to remove SU-8 layer. > > but, it is very hard. I used Remover PG(80β, 30min) but it is > indissolubleness(?). > > For forming mems sensor, the metal layers are deposited around a SU-8 > layer. > > So I want to remove SU-8 2002 without damages of other structures. > > How can I do it? > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk