aluminum and copper are two mostly used... copper has higher conductivity but due to high diffusion coefficient add seed layer below it.. Regards, Bhargav Panchal +91 9742712671 On Monday, 7 April 2014 7:50 PM, Amit Kumarwrote: Can you please tell about the metal layers used in device fabrication..????? On Fri, Apr 4, 2014 at 12:18 PM, Jerry Chen wrote: > i think the stripper is called Omni coat, a product from Microchem. > > > On Thu, Apr 3, 2014 at 7:54 PM, shay kaplan wrote: > > > SU8 is an epoxy and you need an epoxy stripper to take it off. > > If I remember right, Microchem sells a material that you spin under the > > SU8 that enables you to remove it later > > > > -----Original Message----- > > From: mems-talk-bounces+shay=mizur.com@memsnet.org [mailto: > > mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of ??? > > Sent: Thursday, April 03, 2014 8:28 AM > > To: General MEMS discussion > > Subject: [mems-talk] su-8 2002 removal method > > > > I used SU-8 2002 for sacrificial layer(about 2um). > > > > after whole process is finished, I want to remove SU-8 layer. > > > > but, it is very hard. I used Remover PG(80℃, 30min) but it is > > indissolubleness(?). > > > > For forming mems sensor, the metal layers are deposited around a SU-8 > > layer. > > > > So I want to remove SU-8 2002 without damages of other structures. > > > > How can I do it? > > _______________________________________________ > > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > > provider of MEMS and Nanotechnology design and fabrication services. > > Visit us at http://www.mems-exchange.org > > > > Want to advertise to this community? See http://www.memsnet.org > > > > To unsubscribe: > > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > > > > > _______________________________________________ > > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > > provider of MEMS and Nanotechnology design and fabrication services. > > Visit us at http://www.mems-exchange.org > > > > Want to advertise to this community? See http://www.memsnet.org > > > > To unsubscribe: > > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > -- With Regards Amit Kumar QHS(T) Sensor & Nanotechnology Group CSIR-CEERI, Pilani Rajasthan-333031 _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk