Dear All, I am facing shrinkage problem on SU8 2075 photoresist layer on Silicon Substrate. Actually this problem accruing on soft backing process at 65C on hotplate & hot air oven also. Kindly suggest to over come this problem. Thanking you, Best Regards, Karthi _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk