durusmail: mems-talk: Shrinkage problem on SU8 layer on Si Substrate
Shrinkage problem on SU8 layer on Si Substrate
2014-10-23
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Shrinkage problem on SU8 layer on Si Substrate
KarthiKeyan K
2014-10-23
Dear All,

I am facing shrinkage problem on SU8 2075 photoresist layer on Silicon
Substrate. Actually this problem accruing on soft backing process at 65C on
hotplate & hot air oven also.

Kindly suggest to over come this problem.

Thanking you,

Best Regards,
Karthi
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