Dear sir, Thanks for your mail and information. Actually the SU8 photo resist is spined by spin coater at 2500rpm during this process I got uniform coating and then I goes to soft backing for 65c, when I put it on the hotplate or hot air oven (with in 2-3 min) the coated su 8 layer will be shrinkaged and or some times non uniform surface layer on su8 layer during soft backing process. Which one is prefereable for soft/hard backing whether hot plate or air oven??? Looking forward to your suggestion. Thanking you, Best regards, Karthi On Oct 24, 2014 12:55 AM, "Andrew Sarangan"wrote: > > Can you elaborate how you are determining this shrinkage? During softbake > there will be loss of solvents and a change in thickness, but it should not > cause any stresses because the uncured SU8 should reflow above 65C. Perhaps > your ramp rate is too fast causing part of the SU8 to flow while other > parts are still solid? > > On Wed, Oct 22, 2014 at 10:49 PM, KarthiKeyan K > wrote: > > > Dear All, > > > > I am facing shrinkage problem on SU8 2075 photoresist layer on Silicon > > Substrate. Actually this problem accruing on soft backing process at 65C on > > hotplate & hot air oven also. > > > > Kindly suggest to over come this problem. > > > > Thanking you, > > > > Best Regards, > > Karthi > > _______________________________________________ > > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > > provider of MEMS and Nanotechnology design and fabrication services. > > Visit us at http://www.mems-exchange.org > > > > Want to advertise to this community? See http://www.memsnet.org > > > > To unsubscribe: > > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk