durusmail: mems-talk: How to make a metal grid
How to make a metal grid
2016-07-05
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How to make a metal grid
Gary Hillman
2016-07-06
John, photolithographic technology is the clear answer to your question. Gary



Gary Hillman
S-Cubed
9 Mars Court ( USPS PO Box 365)
Montville, NJ 07045

Phone 973-263-0640 ex 535
Mobile 201-755-3760



________________________________________
From: mems-talk-bounces+garyh=s-cubed.com@memsnet.org [mems-talk-
bounces+garyh=s-cubed.com@memsnet.org] on behalf of John Bohland
[jbohland@bloosolar.com]
Sent: Tuesday, June 28, 2016 8:56 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] How to make a metal grid

I am interested in making a metal grid on a 370 mm X 470 mm glass substrate.

The problem is that the metallization lines must be only 1.5 microns in width
and spaced (pitch) only a few microns apart.

The metal can be Al or Ag and 100 nm thick.

The best idea I have is to monolithically coat the glass with sputtered (PVD) Al
or Ag then use a picoseond laser to remove all but the desired 1.5 micron wide
metal line widths. Even then I don't know if the laser would have good enough
resolution to meet these requirements.

Anyone have better ideas?

Thanks,

John

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