durusmail: mems-talk: How to make a metal grid
How to make a metal grid
2016-07-05
John Bohland
2016-07-06
Bill Moffat
2016-07-06
Bill Moffat
2016-07-06
Gary Hillman
2016-07-06
shay@mizur.com
2016-07-07
Philipp Altpeter
2016-07-07
Wilson, Thomas
2016-07-07
Andrew Sarangan
2016-07-12
Daniel Figura
2016-07-12
Roberto Igal Chertkow
2016-07-13
John Bohland
How to make a metal grid
Daniel Figura
2016-07-12
Hello John,

How many substrates do you actually need?

Daniel

-----Original Message-----
From: mems-talk-bounces+daniel.figura=smartfabgroup.com@memsnet.org
[mailto:mems-talk-bounces+daniel.figura=smartfabgroup.com@memsnet.org] On
Behalf Of John Bohland
Sent: Wednesday, June 29, 2016 2:57 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] How to make a metal grid

I am interested in making a metal grid on a 370 mm X 470 mm glass substrate.

The problem is that the metallization lines must be only 1.5 microns in
width and spaced (pitch) only a few microns apart.

The metal can be Al or Ag and 100 nm thick.

The best idea I have is to monolithically coat the glass with sputtered
(PVD) Al or Ag then use a picoseond laser to remove all but the desired 1.5
micron wide metal line widths. Even then I don't know if the laser would
have good enough resolution to meet these requirements.

Anyone have better ideas?

Thanks,

John

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