Fundamentals of microfabrication by Marc Madou.  Good luck, Ramesham


At 10:48 AM 3/30/99 +0200, you wrote:
>Does anybody know where I can find a good and complete exposition about
all the
>micromachining techniques (manifacturing processes: masking, etching, and
>whatever) in use up now ?
>
>Thanks a lot for your time
>
>Sincerely, FABIO
>
>
Dr. Rajeshuni Ramesham
Senior Member of Engineering Staff
Jet Propulsion Laboratory (M/S: 125-152)
California Institute of Technology
4800 Oak Grove Drive
Pasadena, CA 91109

Tel.: 1 818 354 7190
Fax: 1 818 393 5245
e-mail:rajeshuni.ramesham@jpl.nasa.gov