Check out these books:

"Microfabrication" by Marc Madou
&
"Micromachined Transducers Sourcebook" by Gregory Kovacs -this is a great
intro



On Tue, 30 Mar 1999, Fabio Coccetti wrote:

> Does anybody know where I can find a good and complete exposition about all
the
> micromachining techniques (manifacturing processes: masking, etching, and
> whatever) in use up now ?
>
> Thanks a lot for your time
>
> Sincerely, FABIO
>
>