Fundementals of Microfabrication by Marc Madou, CRC Press -----Original Message----- From: Fabio CoccettiTo: MEMS@ISI.EDU Date: Tuesday, March 30, 1999 12:11 PM Subject: MEMS manifacturing info >Does anybody know where I can find a good and complete exposition about all the >micromachining techniques (manifacturing processes: masking, etching, and >whatever) in use up now ? > >Thanks a lot for your time > >Sincerely, FABIO >