durusmail: mems-talk: Re: MEMS manifacturing info
Re: MEMS manifacturing info
Re: MEMS manifacturing info
Gerhard Lammel
1999-04-26
Hi Fabio Coccetti,

> Does anybody know where I can find a good and complete exposition about all
the
> micromachining techniques (manifacturing processes: masking, etching, and
> whatever) in use up now ?
>
> Thanks a lot for your time
>
> Sincerely, FABIO

Da kann ich Dir "Grundlagen der Mikrosystemtechnik", G. Gerlach und
W. Dötzel empfehlen, erschienen im Hanser-Verlag.

Gruss

Gerhard

--
Gerhard Lammel
Institut de microsystemes
Ecole Polytechnique Federale de Lausanne (EPFL)
CH-1015 Lausanne, Switzerland
tel: ++41 (0)21 693 65 73
fax: ++41 (0)21 693 59 50
email: Gerhard.Lammel@epfl.ch


reply