durusmail: mems-talk: Re: Metal sticking well to silicon and silicon nitride
Re: Metal sticking well to silicon and silicon nitride
Re: Metal sticking well to silicon and silicon nitride
Nutt Wolfgang
1996-07-04
Xuecheng Jin wrote:
>
> May I know what kind of good conducting metal stuck well to silicon wafer
> and silicon nitride thin film? How about gold? Do we need to put interface
> layer such as cromium etc. to get better adhesion? Thanks a lot.
>
> Best Regards.                                            Sincerely Yours,
>                                                          XueCheng JIN
>
>
>

We used gold as a masking material on oxid- and nitrid-wafer. Chromium
(Sputter) or Nickel (Evaporation) were good interface layers.

Yours,

W. Nutt
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