>May I know what kind of good conducting metal stuck well to silicon wafer >and silicon nitride thin film? How about gold? Do we need to put interface >layer such as cromium etc. to get better adhesion? Thanks a lot. > >Best Regards. Sincerely Yours, > XueCheng JIN >============================================================================ > XueCheng JIN > -------------- >Phone: (415) 497-0724 (home) Address: 8G Barnes >Web: http://www-leland.stanford.edu/~xcjin Escondido Village >Email: xcjin@leland.stanford.edu Stanford, CA 94305 >============================================================================ > > Answer: If you don't make an HF dip before deposition, you'll always have a natural oxide layer on Si or Si3N4. Thus, to stick to such a material, you have to put first a thin (10 to 50 nm ) adhesive layer like Cr or Ti. If you make the HF dip, Al at least will stick to Si ( usual IC technology ), but about Au or Cu, I can't say! Hopefully, someone else has the experience! Best regards, Pierre Jaccard __________________________________________________________________ Swiss Federal Institute of Technology (EPFL) Address: EPFL, CH-1015 Lausanne, Switzerland Pierre Jaccard Phone: +41(21)693 66 38 FAX: + 41(21)693 66 70 __________________________________________________________________