durusmail: mems-talk: Re: Metal sticking well to silicon and silicon nitride
Re: Metal sticking well to silicon and silicon nitride
Re: Metal sticking well to silicon and silicon nitride
Padmaja Ramadas
1996-07-05
Gold does not stick very well to sio2 or si3n4 surface a thin layer of
chromium is needed as an interface layer.  we e-beam about 1000A
of chromium before the gold is e-beam

good luck
padmaja


reply