> > Gold will stick well to silicon if there is no oxide present. An HF dip > immediately preceeding the metallization is usually sufficient, although a > pre-dep sputter etch is a good idea if you can sputter the metal (depends > on device surface state constraints). To get good adhesion on nitride, I > would recommend a thin chrome or titanium adhesion layer. Titanium is nice > because it's biologically inert and etches easily in very dilute HF > > > > I don't believe titanium to be an appropriate choice of adhesion layer for gold deposition. We have tried and it didn't work for us. Even a simple gold wire doesn't stick to a surface with titanium on it. I am not sure if there are any especial circumstances where gold sticks well to titanium. -- Bahram Ghodsian School of Engineering Science voice: 604-294 1985 Simon Fraser University fax: 604-291 4951 Burnaby, BC, V5A 1S6, Canada ghodsian@cs.sfu.ca