durusmail: mems-talk: Positive resists for MEMS processing
Positive resists for MEMS processing
Making metal clusters on Si substrate
2002-02-19
2002-02-18
2002-02-19
2002-02-19
Positive resists for MEMS processing
BobHendu@aol.com
2002-02-19
Thanks. Would you happen to have photo capabilities for 4" wafers to process
with this resist? We need about 10 wafers processed with a mask replicating
trenches from 2 micron to 50 micron. Bob Henderson 480-558-1156

reply