durusmail: mems-talk: Positive resists for MEMS processing
Positive resists for MEMS processing
Making metal clusters on Si substrate
2002-02-19
2002-02-18
2002-02-19
2002-02-19
Positive resists for MEMS processing
BobHendu@aol.com
2002-02-19
Thomas:
Would you have the capability to process 10 wafers with this resist and apply
a photomask of MEMS trenches from 2-50 microns. We will gladly pay for the
samples. This will allow us to evaluate this resist for deep silicon etches.
Bob Henderson 480-558-1156

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