durusmail: mems-talk: how to deposit PZT
Gold film
how to deposit PZT
2002-05-09
David Yen
how to deposit PZT
2002-05-10
Haigh, Richard
how to deposit PZT
2002-05-10
RobDavis
2002-05-13
Gurvinderjit Singh
2002-05-14
Christopher F. Blanford
tin on copper oxide
2002-05-14
Robert Dean
PLZT robotics
2002-05-22
Gurvinderjit Singh
how to deposit PZT
2002-05-10
Michael Barger
how to deposit PZT
2002-05-10
lucp1429
how to deposit PZT
2002-05-12
TEL Klaus Beschorner
how to deposit PZT
2002-05-13
Haigh, Richard
2002-05-20
Gurvinderjit Singh
2002-05-20
___
2002-05-21
Ravi Shankar
2002-05-21
Michael D Martin
2002-05-22
Henry Yang
2002-05-25
TEL Klaus Beschorner
how to deposit PZT
Gurvinderjit Singh
2002-05-13
_______________________________________________________________________________


   Gurvinderjit Singh Ahluwalia             Tel: +91-0731-488656
     Laser Materials Division               Fax: +91-0731-488650
   Centre for Advanced Technology         email: gjit@cat.ernet.in
   Indore - 452 013  INDIA

_______________________________________________________________________________

 >Dear David
            The quality(Stoichiometry) of the film you get by rf
or other supttering method may not be good, becuase PZT is multicomponent
oxide system. The best method is to get film by sol-gel. Nowdays people
are doing Pulse Laser Deposition (PLD) technique to get better quality
films. Following references may be helpful:
   (1) "Pulse Laser Deposition" G.K.Hubler et al, MRS Bulletin, Feb. 1992
(26-27)
   (2) " Dielectric properties ..... PZ on Si by PLD", Journal of Applied
Phys., 83,12, 1998(7803-7807)


Gurvinder


  > -----Original Message-----
> From: David Yen [mailto:yentajen@ucla.edu]
> Sent: Thursday, May 09, 2002 6:22 PM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] how to deposit PZT
>
> Dear all,
>
>     Does anybody have experience or idea of depositing PZT, especially
> by sputtering? Thanks a lot.
>
> David
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> Visit us at http://www.mems-exchange.org/
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