durusmail: mems-talk: how to deposit PZT
how to deposit PZT
2002-05-09
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Gold film
how to deposit PZT
Christopher F. Blanford
2002-05-14
Dear Rob

Here's good starting point in the scientific literature, offered in case
you wish to pursue sol-gel processing to produce your PZT films.


Nice overview:
o Komarneni, Sridhar; Abothu, Isaac Robin; Rao, Alamanda V. Prasada.
"Sol-gel processing of some electroceramic powders." Journal of Sol-Gel
Science and Technology (1999), 15(3), 263-270.
o Abothu, Isaac Robin; Ito, Yukio; Poosanaas, Patcharin; Kalpat, Sriram;
Komarneni, Sridhar; Uchino, Kenji. "Sol-gel processing of piezoelectric
thin films." Ferroelectrics (1999), 232(1-4), 1071-1075.

Specific to PZT:
o Ishimoto, Yoichi; Matsushita, Jun-ichi; Abothu, Isaac Robin;
Komarneni, Sridhar. "Preparation of lead zirconate titanate using lead
hydroxide by sol-gel process." Journal of Advanced Science (2000),
12(1&2), 36-37.
o Abothu, I. R.; Liu, S.-F.; Komarneni, S.; Li, Q. H. "Processing of
Pb(Zr0.52Ti0.48)O3 (PZT) ceramics from microwave and conventional
hydrothermal powders." Materials Research Bulletin (1999), 34(9),
1411-1419.
o Kalpat, Sriram; Du, X.; Abothu, Issac R.; Akiba, Akira; Goto, Hiroshi;
Uchino, Kenji. "Effect of crystal orientation on dielectric properties
of lead zirconium titanate thin films prepared by reactive
RF-sputtering." Japanese Journal of Applied Physics, Part 1: Regular
Papers, Short Notes & Review Papers (2001), 40(2A), 713-717.
o Schwartz, Robert W.; Boyle, Timothy J.; Lockwood, Steven J.; Sinclair,
Michael B.; Dimos, Duane; Buchheit, Catherine D. "Sol-gel processing of
PZT thin films: A review of the state-of-the-art and process
optimization strategies." Integr. Ferroelectr. (1995), 7(1-4), 259-77.
o Hsueh, Cheng Chen; Mecartney, Martha L. "Microstructural development
and electrical properties of sol-gel prepared lead zirconate-titanate
thin films." J. Mater. Res. (1991), 6(10), 2208-17.

On Friday, May 10, 2002, at 05:29  pm, RobDavis wrote:

> Good Morning,
> I have never had discussion with someone experienced with Sol-gel
> methods....is this a multiple step process? Don't you have to thermal
> process after deposit? How do you control density (porosity)?  Do you
> have
> to apply a DC field above the curie temp to group the domains?
> Just wondering....
> Rob
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: (44)/(0)-1865-282603; Fax: (44)/(0)-1865-272690
PGP keyID: 8D830BC9  http://pgp.mit.edu/

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