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mems-talk
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Hydrogel in microvalve application (Chris Folk)
Laser scalpel (Shay Kaplan)
Thermal evaporation of Al (Marc van den Boogaart)
clean the chips after DRIE (D. Zhou)
silicon nitridation poser (VS Bhat)
clean the chips after DRIE (Florian Herrault)
clean the chips after DRIE (Julie Verstraeten)
clean the chips after DRIE (Matthew Walker)