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mems-talk
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SU-8 structure using wet etching (Prem Pal)
Sputerring Al/TiW (Kim Anh Bui)
Release of SU-8 structures using wet etching (Michael Larsson)
Microfab book for undergrad (Jose Guevarra)
Microfab book for undergrad (Richard B. Keithley)
Microfab book for undergrad (Anna Torrents Cabestany)
Microfab book for undergrad (Andrew Sarangan)
sputtering target (walter)