durusmail
:
mems-talk
..
rib waveguide using dry etch (杜 彦召)
Some silicon-dioxide will not etch in BHF...can that be? (antwi nimo)
direct patterning/fabrication on existing SiN membrane (Aaron Datesman)
rib waveguide using dry etch (Pramod Gupta)
direct patterning/fabrication on existing SiN membrane (Bill Moffat)
direct patterning/fabrication on existing SiN membrane (Andrea Mazzolari)
rib waveguide using dry etch (Bill Moffat)