Hi, We are looking for supplier who can drill more than 1 mm holes on thick (1 mm) Pyrex glass wafers. Please write to propak@singnet.com.sg Regards. ----- Original Message ----- From: "이태원"To: Sent: Wednesday, July 02, 2003 11:01 PM Subject: [mems-talk] Cu Metal Etchant > hi. > > I heard about Cu could be patterned by something like CMP Process ( damascene(?) process) > > Are there any wet etchants fot Cu etch? If not, what is the main reason about that? > > Furthermore, Adhesion layer (Ti or Cr) is not required when I deposit Cu on Si Wafer ? > > Thank you for in Advance. > > TW Lee. > > ----------------------------------------------------------- > AeroMEMS Laboratory. > School of Mechanical & Aerospace Engineering. > Seoul National University , Seoul , KOREA. > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/