Chromium is used because it has good adhesion. Titanium is also a good choice but perhaps most other metal coatings should last better than a laminated resist(?). Maybe others can elaborate as I don't have much experience here (in particular which metals withstand HF best and the role of oxide layers). If you can't coat Chromium, I guess you don't have the capability to coat much else so I would suggest you could buy some pre-coated glass wafers. You can buy glass coated with Chromium (plus a CrO layer) and resist fairly cheaply. Gareth Kannan Ramaraj wrote: > Hi all! > I am trying to make one-dimensional groove pattern over the glass surface with a width and depth ranging from 50micron to 200 micron. I laminated dry photoresist over the glass surface and prepared the pattern in the glass surface. Photoresist is not staying more than 1 minute if i put it in dilute HF. And also I read in this site that I can use Chromium as a sacrificial layer. But I don't have chromium with me. Can you suggest some other material as a sacrificial layer ? Whether I have to coat my sacrificial layer before or after the photoresist ? Please give some idea to overcome this issue. > Thanks! >