Greetings,
Yes indeed very smooth .
We use a mask than perform litho, and than we use our microblasting
technology a stream of ionized particles erodes rapidly the designated areas
hope this helps
walter
----- Original Message -----
From: "Xiaoguang "Leo" Liu" 
To: "General MEMS discussion" 
Sent: Friday, September 01, 2006 8:23 AM
Subject: Re: [mems-talk] Regarding Glass lithography


> Hi Walter
> Could you elaborate a little bit on the "micro/photo machining
> technology"?
> Do you achieve smooth side wall profile using that kind of tech? Thanks
> Best
> Leo
>
> On 9/1/06, walter essinger  wrote:
>> Greetings,
>> did you consider micro/photo machining technology?
>> the 50 M is no problem 200 M is a bit of a challenge..
>> for more info you can contact me
>> engineering@elume.com
>> kind regards
>> walter
>>
>
>