durusmail: mems-talk: Regarding Glass lithography
Regarding Glass lithography
2006-08-29
2006-08-29
2006-08-30
Re: AW: [mems-talk] Regarding Glass lithography
2006-08-30
2006-09-01
2006-08-29
2006-08-30
2006-08-31
Regarding Glass lithography
Gareth Jenkins
2006-08-30
Spin coating a resist (with an adhesion promoter) may be good enough for
50 microns depth in glass but I am not sure about 200 microns (at least
in my experience). I think an additional metal masking layer is required
for this kind of depth.


Bill Moffat wrote:
> Use vacuum vapor prime deposition of HMDS to make the resist stick
> forever.
>

reply