Hi, you can also use Titanium as adhesion layer.... Regards Marc -----Ursprüngliche Nachricht----- Von: Kannan Ramaraj [mailto:aerokannan@rediffmail.com] Gesendet: Dienstag, 29. August 2006 12:51 An: mems-talk@memsnet.org Betreff: [mems-talk] Regarding Glass lithography Hi all! I am trying to make one-dimensional groove pattern over the glass surface with a width and depth ranging from 50micron to 200 micron. I laminated dry photoresist over the glass surface and prepared the pattern in the glass surface. Photoresist is not staying more than 1 minute if i put it in dilute HF. And also I read in this site that I can use Chromium as a sacrificial layer. But I don't have chromium with me. Can you suggest some other material as a sacrificial layer ? Whether I have to coat my sacrificial layer before or after the photoresist ? Please give some idea to overcome this issue. Thanks! With regards, R.Kannan