You should let us know what resist you did use and the narrowest width you want to make. Without these information..It is somewhat annoying because it seems you don't have any evaporator or sputter. So let us know your design specs and availabity of sputter or evaporator. sokwon Marc Häfnerwrote: Hi, you can also use Titanium as adhesion layer.... Regards Marc -----Ursprüngliche Nachricht----- Von: Kannan Ramaraj [mailto:aerokannan@rediffmail.com] Gesendet: Dienstag, 29. August 2006 12:51 An: mems-talk@memsnet.org Betreff: [mems-talk] Regarding Glass lithography Hi all! I am trying to make one-dimensional groove pattern over the glass surface with a width and depth ranging from 50micron to 200 micron. I laminated dry photoresist over the glass surface and prepared the pattern in the glass surface. Photoresist is not staying more than 1 minute if i put it in dilute HF. And also I read in this site that I can use Chromium as a sacrificial layer. But I don't have chromium with me. Can you suggest some other material as a sacrificial layer ? Whether I have to coat my sacrificial layer before or after the photoresist ? Please give some idea to overcome this issue.