I have had good luck using a very long O2 plasma clean (24 hours!). Also, you might want to use resist stripper or ethanol for the initial lift off, acetone can leave a lot of crud behind. David Nemeth -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Yue Mun Pun, Jeffrey Sent: Monday, August 06, 2007 5:09 AM To: mems-talk@memsnet.org Subject: [mems-talk] Lift-off process Hi, I am attempting a lift-off technique to pattern gold. I have patterned 7-8um of AZ9260 on SiO2 wafers and evaporated 10nm Chromium followed by 300nm Gold through the patterns in the AZ9260 resist. Subsequently I have lifted off most of the resist by soaking the wafers in Acetone over 2 days. However I have noticed that there are some resist residue that won't be lift-off even after sonication. The sonication process also leaves a lot of debris on the wafer. I am trying to remove these debris and the remaining residue by soaking the wafers overnight in AZ300T Stripper. Does anyone have an alternative technique to suggest to clean the wafers? I have tried using H2SO4:H2O2 = 3:1 (piranha) by it may damage by structures, so I refrain from using this technique.