durusmail: mems-talk: fudging/spreading around the PR features
fudging/spreading around the PR features
2007-10-05
2007-10-05
2007-10-06
NC-200
2007-10-08
Lithographic Tests masks for the EVG620
2007-10-12
2007-10-05
2007-10-06
Sapphire stiffness matrix
fudging/spreading around the PR features
Sadhana Patil
2007-10-05
I am new to Photolithography. I am doing Photolithography with S1813.
Many a times I get fudging/spreading of photoresist around the edge of
the photoresist features after developing. They look more or less like
threads spreading outward from the feature.
Does anyone know what am I doing wrong?
~Sadhana
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