Dear Jeffrey, if you clean the glass wafer with an oxygen plasma before you spin on the SU-8, adhesion should not be an issue. Make sure that you get rid of all water molecules on the glass surface. If you do not have a plasma, at least perform a dry bake before applying the SU-8. I recommend to cut the glass wafer with a wafer saw. Regards, Silvan Yue Mun Pun, Jeffrey schrieb: > Hi, > I am using SU-8 2000 series and may need to use it on glass wafers. Can anyone suggest how I can make SU-8 adhere to glass, whether I need to spin coat Omnicoat or treat the glass with oxygen plasma? > Also, how do I dice the glass wafers? I have tried using a manual diamond scriber but it does not cut the glass in straight lines. -- ETH Zurich Silvan Schmid, Dipl. Ing. ETH Micro and Nanosystems CLA G 14.2 Tannenstrasse 3 8092 Zurich, Switzerland silvan.schmid@micro.mavt.ethz.ch www.micro.mavt.ethz.ch +41 44 632 44 53 phone +41 44 632 14 62 fax