I may miss some comments. You can use SU-8 3000 for coating glass with better
adhesion result. If you have to use SU-8 2000 products, try clean substrate
surface with oxygen plasma or Piranha solution, dry it with a hot plate and
increase the exposure time.

  Jian Wang
  Senior Scientist
  Flexcell International

"Yue Mun Pun, Jeffrey"  wrote:
  Hi,
I am using SU-8 2000 series and may need to use it on glass wafers. Can anyone
suggest how I can make SU-8 adhere to glass, whether I need to spin coat
Omnicoat or treat the glass with oxygen plasma?
Also, how do I dice the glass wafers? I have tried using a manual diamond
scriber but it does not cut the glass in straight lines.