Hi Nicolas, My recommendation is using a Epoxy-material with spacer. Spacer are cylindrical particles (normally parts of glass fibres) diameters accuracy is very high. After pressing both parts together spacer will orientate themself and will form a very accurate distance beween both planes. Tolerance is less than +/- 3µm (we have had used diameter of 5µm and had distance between 4.75 and 5.08). Regards, Bernd Krüger Productdevelopment Draloric/Beyschlag Resistors Division Tel.: +49 481 95-255 Fax: +49 481 95-208 E-mail: Bernd.Krueger@Vishay.com Homepage: http://www.vishay.com VISHAY BCcomponents BEYSCHLAG GmbH Rungholtstr. 8-10, D-25746 Heide Amtsgericht/County Court Pinneberg HR B 1508 ME Geschäftsführer/Managing Directors: Stephan Höllerl, Werner Gebhardt, Frank Kabbe -----Ursprüngliche Nachricht----- Von: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] Im Auftrag von Nicolas Vergauwe Gesendet: Mittwoch, 12. November 2008 09:43 An: mems-talk@memsnet.org Betreff: [mems-talk] Spacer material Hi everyone, Could you suggest me a spacer material for separating two (horizontal) glass plates? The spacer should have a thickness of 100 µm, but more importantly, the thickness tolerance should be as low as possible. Also, the spacer needs to be fixed manually on the glass plate: it cannot be processed on the glass plate but it has to be attached afterwards. I thought of using a thin metal sheet and then glue it to the glass plate, but I don't know if it will be the best way. Any help or ideas are welcome! Nicolas