durusmail: mems-talk: Deposition of Chromium and Platinum
Deposition of Chromium and Platinum
2009-01-19
2009-01-19
2009-01-19
2009-01-20
2009-01-20
2009-01-22
2009-01-20
Deposition of Chromium and Platinum
Yinyan Gong
2009-01-20
Substrate is boron compound and the total thickness of the metal layer
is 150nm. The thickness of Shipley 1165 is about 1.3um.

Yinyan

Ruiz, Marcos Daniel (SENCOE) wrote:
> What substrate material are you using?  How thick are the metal layers?
>
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