Hello, everyone. I use the positive photoresist to do some lithography. I have a big problem. My samples are rectangular which have dimensions 10mm*15mm After the resist spinning, I found that the resist film around the edge of the sapmle is thicker than the resist in the center. This produces a gap when the contact exposure is applied. And the resist profile is not good enough after the development. I shall be highly obliged if anyone can help me out in this and provide some advices. Thanks in advance Yours sincerely, Lei Wang School of Physics Shandong University 5, Hongjialou, Jinan, Shandong Province 250100 P. R. China Tel:86-531-88364655 Fax: 86-531-88565167 Email: leiwangsdu@sdu.edu.cn