Lei, At least 2 companies built the answer in the 90's. The problem lies in the air vortexes above the substrate during spin. Mask makers hit it first with square substrates. The cure was another square substrate above and close the substrate to reduce air vortexes above the treated substrate. Bill Moffat ________________________________ From: mems-talk-bounces@memsnet.org on behalf of Robert MacDonald Sent: Thu 2/11/2010 11:08 PM To: mems-talk@memsnet.org Subject: [mems-talk] Help for photoresist coating Lei, it is possible to put a uniform coating on a rectangular substrate, or at least to improve performance. You turn off the exhaust to your spinner, and saturate the spinner environment with the solvent used in the resist (sometimes by putting clothes soaked in it in there), and close the lid. Then spin your resist. After the spin/spread cycle is done, turn the exhaust on to initiate drying. this should help. If your spinner doesn't have all these features automatically, you should be able to rig something manual up. I did this years ago on small rectangular substrates and got good improvement. Good luck. Rob MacDonald Shearwater Scientific www.shearwaterscientific.com