Lei, I have experienced this issue with similar size substrates. Try covering the substrate with a smaller piece of silicon and using flood exposure to expose the edgebead. Then, develop it away. Another approach is to use a photolithography mask with a rectangular pattern slightly smaller than your substrate, align the mask to the substrate, and use proximity contact or soft contact mode during exposure of the edgebead. Then, develop it away. Sagi Mathai Information and Quantum Systems Lab Hewlett-Packard Laboratories -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of leiwangsdu Sent: Wednesday, February 10, 2010 5:02 PM To: mems-talk Subject: [mems-talk] Help for photoresist coating Hello, everyone. I use the positive photoresist to do some lithography. I have a big problem. My samples are rectangular which have dimensions 10mm*15mm After the resist spinning, I found that the resist film around the edge of the sapmle is thicker than the resist in the center. This produces a gap when the contact exposure is applied. And the resist profile is not good enough after the development. I shall be highly obliged if anyone can help me out in this and provide some advices. Thanks in advance Yours sincerely, Lei Wang