Hello,

We have a process in which 20nm Au were deposited as a sacrificial layer
on Al.  We need to remove the Au in a later step.  We have found that
iodine-based Au etchant undercuts the Al.  We are looking for a process
that will selectively etch the Au without etching the Al.

Thank you,

Lisa Gades
Scientific Associate
Optics and Detector Group
Advanced Photon Source
Argonne National Laboratory