durusmail: mems-talk: Wet-chemical etching of Au without etching Al
Wet-chemical etching of Au without etching Al
2010-02-15
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Wet-chemical etching of Au without etching Al
Dave Lewis
2010-02-16
http://grover.mirc.gatech.edu/processing/Etchants.pdf

Sorry about the broken link. It should work now.

Regards,
Dave Lewis

Sensor R&D
Lake Shore Cryotronics

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Andy Irvine
Sent: Tuesday, February 16, 2010 12:32 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Wet-chemical etching of Au without etching Al

The link doesn't work for me, Dave.  Could you check?
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