http://grover.mirc.gatech.edu/processing/Etchants.pdf Sorry about the broken link. It should work now. Regards, Dave Lewis Sensor R&D Lake Shore Cryotronics -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Andy Irvine Sent: Tuesday, February 16, 2010 12:32 PM To: General MEMS discussion Subject: Re: [mems-talk] Wet-chemical etching of Au without etching Al The link doesn't work for me, Dave. Could you check?