durusmail: mems-talk: Wet-chemical etching of Au without etching Al
Wet-chemical etching of Au without etching Al
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2010-02-19
Wet-chemical etching of Au without etching Al
Lisa Gades
2010-02-19
Hi David,

We are not at all committed to using Au; in fact, we had tried Cr
first.  Thank you for your suggestions of other metals to try with a dry
etch process.

Thanks again to everyone for your helpful suggestions!  We have several
avenues to try.

Lisa
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