durusmail: mems-talk: what CMOS compatible means exactly
what CMOS compatible means exactly
2010-05-12
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what CMOS compatible means exactly
Alex Mellnik
2010-05-12
Hi,

See page 2 of http://www.cnf.cornell.edu/doc/Compatibility_Policy.pdf for
one explanation of it.

-Alex

On Wed, May 12, 2010 at 1:55 AM, Yu Chen  wrote:

> I am wondering what CMOS compatible means exactly.
>
> Probably it includes:
>
> Materials: some materials are not allowed
>
> Process: some processes are not preferred like liftoff
>
> Temperature:
>
> …
>
> Any comments are welcome.
>
> Thanks
>
> Yu CHEN
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