I think it means it can be fabricated using CMOS tools and materials. Bulk machining is not CMOS compatible, some surface machining is. But I'm guessing myself, Robert -----Original Message----- From: mems-talk-bounces+r-black1=ti.com@memsnet.org [mailto:mems-talk-bounces+r-black1=ti.com@memsnet.org] On Behalf Of Alex Mellnik Sent: Wednesday, May 12, 2010 10:37 AM To: General MEMS discussion Subject: Re: [mems-talk] what CMOS compatible means exactly Hi, See page 2 of http://www.cnf.cornell.edu/doc/Compatibility_Policy.pdf for one explanation of it. -Alex