Gold Marco ________________________________________________________________ Marc Reinig Phone: (831) 459-4362 Laboratory for Adaptive Optics Fax: (831) 459-2298 UCO/Lick Email: mreinig@ucolick.org University of California, Santa Cruz 1156 High Street Santa Cruz, CA 95064 > -----Original Message----- > From: mems-talk-bounces+mreinig=ucolick.org@memsnet.org [mailto:mems- > talk-bounces+mreinig=ucolick.org@memsnet.org] On Behalf Of Yu Chen > Sent: Thursday, May 13, 2010 5:28 PM > To: General MEMS discussion > Subject: Re: [mems-talk] what CMOS compatible means exactly > > for a standard CMOS cleanroom. > that materials are allowed and not allowed? > > I know that CMOS cleanroom usually do not use liftoff process. > Is there any other process are not prefered in CMOS cleanroom, but > frequently used in other lower level lab? > > best > > Yu CHEN > > On Fri, May 14, 2010 at 4:39 AM, Robert Blackwrote: > > > I think it means it can be fabricated using CMOS tools and materials. > Bulk > > machining is not CMOS compatible, some surface machining is. > > > > But I'm guessing myself, > > > > Robert > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > !DSPAM:10003,4bed552b1030219834256!